| Ticker Symbol | Entity Name | Form Type | Access Number | Period | As Of Date | Filing Date | Institution Name | CIK | Name of Issuer | Title of Class | CUSIP | Value | SHRS or PRN Amount | SHRS or PRN Type | PUT_CALL | Investment Discretion | Other Manager | Voting Authority Sole | Voting Authority Shared | Voting Authority None | Date Added | Date Updated | Company Name | Sector | Industry |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| nasdaq:asys | nasdaq:asys Shareholders | 13F-HR | 0001719087-22-000003 | Mar 31st, 2022 12:00AM | May 16th, 2022 12:00AM | May 16th, 2022 12:00AM | Diametric Capital, LP | 1719087 | Amtech Systems Inc | COM | 032332504 | 104 | 10366 | SH | DFND | 1 | 10366 | 0 | 0 | May 17th, 2022 01:57AM | May 17th, 2022 01:57AM | Amtech Systems | Technology | Technology Hardware & Equipment | |
| nasdaq:asys | nasdaq:asys Shareholders | 13F-HR | 0001633046-22-000004 | Mar 31st, 2022 12:00AM | May 16th, 2022 12:00AM | May 16th, 2022 12:00AM | Maven Securities LTD | 1633046 | AMTECH SYS INC | COM PAR $0.01N | 032332504 | 1006 | 100000 | SH | DFND | 2 | 100000 | 0 | 0 | May 17th, 2022 01:57AM | May 17th, 2022 01:57AM | Amtech Systems | Technology | Technology Hardware & Equipment | |
| nasdaq:asys | nasdaq:asys Shareholders | 13F-HR | 0001493152-22-013621 | Mar 31st, 2022 12:00AM | May 16th, 2022 12:00AM | May 16th, 2022 12:00AM | BOOTHBAY FUND MANAGEMENT, LLC | 1549230 | AMTECH SYS INC | COM PAR $0.01N | 032332504 | 4365 | 433915 | SH | OTR | 0 | 433915 | 0 | May 17th, 2022 01:52AM | May 17th, 2022 01:52AM | Amtech Systems | Technology | Technology Hardware & Equipment | ||
| nasdaq:asys | nasdaq:asys Shareholders | 13F-HR | 0001446194-22-000004 | Mar 31st, 2022 12:00AM | May 16th, 2022 12:00AM | May 16th, 2022 12:00AM | SUSQUEHANNA INTERNATIONAL GROUP, LLP | 1446194 | AMTECH SYS INC | COM PAR $0.01N | 032332504 | 527 | 52400 | SH | Put | DFND | 2 | 0 | 0 | 0 | May 17th, 2022 01:51AM | May 17th, 2022 01:51AM | Amtech Systems | Technology | Technology Hardware & Equipment |
| nasdaq:asys | nasdaq:asys Shareholders | 13F-HR | 0001446194-22-000004 | Mar 31st, 2022 12:00AM | May 16th, 2022 12:00AM | May 16th, 2022 12:00AM | SUSQUEHANNA INTERNATIONAL GROUP, LLP | 1446194 | AMTECH SYS INC | COM PAR $0.01N | 032332504 | 394 | 39116 | SH | DFND | 2 | 39116 | 0 | 0 | May 17th, 2022 01:51AM | May 17th, 2022 01:51AM | Amtech Systems | Technology | Technology Hardware & Equipment | |
| nasdaq:asys | nasdaq:asys Shareholders | 13F-HR/A | 0001446114-22-000022 | Mar 31st, 2022 12:00AM | May 16th, 2022 12:00AM | May 16th, 2022 12:00AM | Ancora Advisors, LLC | 1446114 | AMTECH SYS INC | COM | 032332504 | 500 | 49664 | SH | SOLE | 43097 | 0 | 6567 | May 17th, 2022 01:51AM | May 17th, 2022 01:51AM | Amtech Systems | Technology | Technology Hardware & Equipment | ||
| nasdaq:asys | nasdaq:asys Shareholders | 13F-HR/A | 0001446114-22-000022 | Mar 31st, 2022 12:00AM | May 16th, 2022 12:00AM | May 16th, 2022 12:00AM | Ancora Advisors, LLC | 1446114 | AMTECH SYS INC | COM | 032332504 | 155 | 15403 | SH | SOLE | 3 | 15403 | 0 | 0 | May 17th, 2022 01:51AM | May 17th, 2022 01:51AM | Amtech Systems | Technology | Technology Hardware & Equipment | |
| nasdaq:asys | nasdaq:asys Shareholders | 13F-HR | 0001213900-22-027185 | Mar 31st, 2022 12:00AM | May 16th, 2022 12:00AM | May 16th, 2022 12:00AM | B. Riley Asset Management, LLC | 1841077 | AMTECH SYSTEMS INC | COMM | 032332504 | 3358 | 333755 | SH | SOLE | 333755 | 0 | 0 | May 17th, 2022 01:48AM | May 17th, 2022 01:48AM | Amtech Systems | Technology | Technology Hardware & Equipment | ||
| nasdaq:asys | nasdaq:asys Shareholders | 13F-HR | 0001213900-22-026835 | Mar 31st, 2022 12:00AM | May 16th, 2022 12:00AM | May 16th, 2022 12:00AM | OBERWEIS ASSET MANAGEMENT INC/ | 937886 | Amtech Systems, Inc. | com | 032332504 | 1114 | 110700 | SH | SOLE | 110700 | 0 | 0 | May 17th, 2022 01:48AM | May 17th, 2022 01:48AM | Amtech Systems | Technology | Technology Hardware & Equipment | ||
| nasdaq:asys | nasdaq:asys Shareholders | 13F-HR | 0001102578-22-000086 | Mar 31st, 2022 12:00AM | May 16th, 2022 12:00AM | May 16th, 2022 12:00AM | EARNEST PARTNERS LLC | 1102578 | AMTECH SYS INC | COM | 032332504 | 17 | 1700 | SH | SOLE | 0 | 0 | 1700 | May 17th, 2022 01:45AM | May 17th, 2022 01:45AM | Amtech Systems | Technology | Technology Hardware & Equipment |